Chair for Micro – and Nanoelectronics at RWTH Aachen University

Contact persons:

Max Lemme

RWTH Aachen

Templergraben 55
52062 Aachen

Germany

Equipment / Facilities

Processing platform

  • Dielectric deposition: LPCVD, ALD (Si3N4, SiO2, Al2O3)
  • Thin film deposition: E-Beam evaporation, Sputtering (Al, Ti, TiN, W, Ni, Cr, Co, HfO2)
  • 2D material deposition: CVD (graphene), ALD, PECVD
  • Pattern transfer: ICP/RIE (anisotropic profiles, smooth surfaces, F and Cl based etch chemistry)
  • Lithography: E-Beam lithography, Optical lithography (6” Mask Aligner, 6” I-line stepper), Interference lithography, Nanoimprint lithography
  • Wet chemistry
  • Critical point drying
  • Wafer dicing

Modelling platform

  • Lumerical FDTD (Photonics, Sensors)
  • Ansys Electronics HFSS (Photonics)
  • Phoenix OptoDesigner (Photonics)

Characterization platform

  • Automated SEM
  • Raman spectroscopy (532 nm, 637nm, 785 nm laser): Photo luminescence, photo current mapping, in-situ pressure/humidity
  • Electrical characterization: temperature range (20 K -600 K), DC, RF (up to 110 GHz)
  • Optical characterization: Light sources with 850 nm, 1310 nm, 1550 nm, tunable sources, electro optic, temperature rang (20 K – 600 K)
  • Spectroscopic ellipsometry
  • Atomic force microscope
  •  Optical microscope
Expertise
Main Expertises
Beyond CMOS Neuromorphic Computing
  • Coordinator of large German project “NEUROSYS”: Neuromorphic Hardware for Autonomous Artificial Intelligence Systems
Phonon engineering x
Small slope switches-NW/TFET/NEMS x
Alternative materials-2D layers
  • 2D materials based devices and characterization
  • Participant in:
    •  Graphene Flagship
    • 2D Experimental Pilot line
    • other EU/national projects
Novel devices for ultra-low power x
1D x
Quantum Technologies & Very low temperature electronics
  • Quantum Photonics
More Moore Logic Nanodevices& circuits
  • Transistors
  • Inverters
  • Ring oscillators
  • High k-dielectrics
Memories
  • Non-volatile memory devices
Very low power devices x
High temperature electronics x
More than Moore micro-nano-bio Sensors & Systems
  • Photodetectors
  • Pressure sensors
  • Humidity sensors
  • Strain sensors
Energy Harvesting x
RF devices & circuits
  • RF Transistors
  • RF diodes
  • Characterization up to 11GHz
Photonics devices
  • Silicon and silicon nitride photonics
  • 2D photodetectors
  • Multispectral photodetectors
  • High speed photodetection
Power devices x
Flexible electronics
  • Flexible electronics with 2D materials
Smart systems& Systems design Smart systems x
Systems design x
Research interests
Research interests
Beyond CMOS Neuromorphic Computing
  • 2D Material based Memristors
  • Photonic Neuromorphic Circuits
  • Technology transfer
Phonon engineering x
Small slope switches-NW/TFET/NEMS x
Alternative materials-2D layers
  • Graphene
  • Transistion metal dichalcogenides
  • Dielectric deposition on 2D materials
  • Electronics, Photonics, Sensors, RF, Flexible Electronics
Novel devices for ultra-low power x
1D x
Quantum Technologies & Very low temperature electronics
  • Photonic Integrated Circuits
More Moore Logic Nanodevices& circuits
  • Electrical contacts to 2D materials
  • 2D material based hot electron transistors
  • Flexible devices
  • Ultimate scaling of 2D material-based FETs
Memories
  • Graphene non-volatile memory device
  • (Non-volatile) memristive elements
Very low power devices x
High temperature electronics x
More than Moore micro-nano-bio Sensors & Systems
  • 2D material based: MEMS(strain sensors, pressure sensors)
  • 2D NEMS
  • 2D material photodiodes
  • 2D material spectral Photodetectors
  • Flexible sensors
Energy Harvesting
  • Perovskite based solar cells on chip
  • RF / THz rectennas
RF devices & circuits
  • Graphene-based diodes and RF circuits
  • Graphene THz antennas
  • 2D RF transistors and circuits
Photonics devices
  • PICs
  • IR detectors
  • Graphene photodetectors
  • 2D material-based photodetectors
  • Si and SiN photonics
Power devices x
Flexible electronics
  • 2D materials based flexible electronics
  • Hall sensors
  • Photodetectors
  • Integrated circuits
Smart systems& Systems design Smart systems
  • Flexible integrated systems with 2D materials
Systems design x