Uppsala University

Contact persons:

Professor Shili Zhang


Uppsala University

St. Olofsgatan 10 B

SE-751 05 Uppsala,

SWEDEN

Equipment / Facilities

Processing platform

Cleanroom:

State-of-art CMOS process line with EBL (~10 nm capability)

Modelling platform

Commercial TCAD software packages :

  • Silvaco,
  • ISE/Synopsys,
  • Cadence,
  • Fluent,
  • Comsol Multiphysics,
  • etc.

Characterization platform

  • Physical:
    • Titan-TEM,
    • dual-beam FIB,
    • HR-SEM,
    • XPS,
    • Raman,
    • AFM,
    • etc.
  • Electrical:
    • State-of-art parameter analyzers (2 pieces of Agilent B1500A),
    • Low-frequency noise in electrolytes (Keysight ALFNA E4727A),
    • Axopatch 200B for low-noise ionic current,
    • Stations for electrochemistry
    • High-frequency up to 325 GHz
    • etc.
Expertise

Beyond CMOS

More Moore / Logic devices & circuits

More Moore / Memories

More than Moore / Sensors

  • Various nanoscale (0D, 1D, 2D, 3D) sensors for ions and charged molecules (e.g. DNA, protein) working in electrolytes:  Various sensor technologies:
    • 0D: Nanopore for DNA sequencing, etc.
    • 1D: Nanowire for ultrahigh-sensitivity
    • 2D: Nanosheet for beyond-Debye-length detection
    • 3D: Micro-capillary for large molecules

More than Moore / Energy Harvesting

  • TEG based on abundant materials (e.g. Si)

More than Moore / RF devices & circuits

More than Moore / Photonics devices

More than Moore / Power devices

Flexible electronics / Organic devices

Flexible electronics / Others

  • Materials synthesis (PVD, CVD, ALD, solution-phase), e.g. 2D materials & functional oxides
  • Printable electronics (CNT-TFTs, graphene transparent conductor, etc.)
  • Novel materials and nanophononics for thermoelectrics
  • Solution processing of low-dimensionality materials
  • Mixed vacuum-solution processing towards fabrication of active and passive devices

Smart systems

Systems design

Research interests

Beyond CMOS

  • New dimensions to enable “down-scaling” without necessarily further reducing the physical size of devices

More Moore / Logic devices & circuits

More Moore / Memories

More than Moore / Sensors

  • Nanoscale sensors based on:
    • Nanopores
    • nanowires,
    • 2D functional materials

More than Moore / Energy Harvesting

  • Novel device fabrication processes
  • Nanophononics (e.g. nanohole array, superlattice, etc.)

More than Moore / RF devices & circuits

More than Moore / Photonics devices

More than Moore / Power devices

Flexible electronics / Organic devices

Flexible electronics / Others

  • Flexible electronics based on low-dimensionality semiconductor materials (CNT, graphene, TMDCs)
  • Self-powered flexible electronics
  • PVD, CVD and ALD based synthesis of such materials

Smart systems

Systems design