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Grenoble INP (France)

 

The Polytechnic Institute of Grenoble is a Federation of 9 engineering schools and 27 research laboratories. It is the first French group of education in engineering. The main labs in the domain of nanoelectronics are gathered under the Federation on Micro and Nano Technology (FMNT).


www.grenoble-inp.fr

 

Number of persons working in the Nanoelectronics field:

About 70 permanent staff members working in the field of nanoelectronics and 50 post-docs and PhD students

 

Main Research activities in Nanoelectronics

  • Development of new technologies (nanoimprint, diblock copolymers) and expertise in top down patterning techniques
  • Innovative materials (silicon nanowires, high k dielectrics, GST for phase change memories)
  • Integration of silicon nanowires in innovative devices
  • Advanced electrical characterizations and simulations of MOSFETs and new devices based on silicon nanowires
  • Magnetic µsystems
  • Spintronics nanodevices

 

Research facilities

Processing facilities: 450 m2 clean room driven by FMNT and INAC

  • E-beam JEOL
  • Nano-imprint
  • Etching capabilities for silicon, dielectrics and metals using 3 inductively coupled plasmas (one etch tool dedicated to deep etching)
  • Multiple PVD deposition tools for oxides, metals, magnetic materials

Characterization platform

  • Morphological and structural: XRD, Angle-resolved XPS, Raman...
  • Several AFM/STM microscopes with EFM, TUNA, SCM, MFM...
  • Wide range of probe stations for electrical measurement including cryogenic probe station for 200mm wafers, Hall and magnetoresistance measurements, noise, charge pumping, transport parameters extraction
  • RF measurements including a 300mm probe station with 110GHz VNA
  • THz and optical measurements


Dissemination

Collaboration/projects

  • 20 Rhone-Alpes research contracts
  • 4 research contracts with MINEFI including contracts with the MEDEA + Label
  • 5 ACI contracts
  • 6 research contracts with ANR
  • 21 European research contracts
  • 5 networks of excellence
  • 26 industrial contracts
 

6 Spin-offs between 2003 and 2007

 
3 International Conferences/Workshops (/year) and 1 annual Summer School (MIGAS)


Publications/year

  • 150 international reviewed papers
  • 30 invited international conferences
  • 160 international conferences
  • 12 books or chapters

 

Contact

Francis Balestra