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IMEL/NCSR Demokritos (Greece)

 

IMEL at NCSR Demokritos is the greek national Institute of Excellence in Micro, Nanotechnologies and MEMs, with full capability in silicon processing, in device and MEMs fabrication and in electrical, optical and structural characterization. Its main activities are in micro and nanofabrication, nanostructures, nanoelectronics, sensors and MEMs.


www.imel.demokritos.gr

 

Number of persons working in the Nanoelectronics field:

79 persons (15 researchers, 2 research engineers, 4 other scientific staff, 17 PostDoc, 28 PhD students, 13 technical and administrative personel)

 

Main Research activities in Nanoelectronics


 

Research facilities

Silicon processing laboratory in a clean room area of 300 m2, equipped with the following:

  • 4 laminar flow chemical benches
  • 7 horizontal hot-wall furnace tubes
  • 2 horizontal LPCVD tubes for nitride, oxide (TEOS), polysilicon
  • 1 horizontal LPCVD tube for LTO
  • Ion Implanter (EATON medium current, 200 KeV)
  • Optical lithography systems (resolution down to 0,6 μm)
  • Electron beam lithography system (resolution 50 nm)
  • Plasma processing systems (Reactive Ion Etcher and High Density Plasma Etcher)
  • Metallization equipment (thermal, e-gun evaporation, sputtering)
  • Process inspection equipment

Characterization and testing laboratories

  • Electrical characterization equipment:
  * Karl Suss PA150 semi-automatic and manual probe stations
  * HP measuring systems 
  * Keithley measuring equipment 
  * Tektronix 224J Oscilloscope
  * Oxford optistat Cryostats for temperatures in the range 4.2-320 K
 
  • Optical characterization equipment:

  * Multiwavelength Spectroscopic Ellipsometer
  * Jobin Yvon spectrometer, wavelengths 300 - 1600 nm
  * Argon Laser
  * Oxford optistat Cryostat, 4.2 - 320 K

 

  • Morphology, structural characterization:

  * Leo 440 SEM
  * AFM
  * Profilometer

 

  • Testing equipment:

Systems for testing of gas flow, gas, pressure, acceleration and humidity sensors


Dissemination

Training activities

2/year on topics like Nanoelectronics, MEMs, microfluidics, etc. 

 

Collaboration/projects

  • EU: 13
  • Non-EU: 5
  • National: 14
  • Industrial: 4
 

2 International Conferences and/or Workshops /year


Publications/year

  • Publications in Inter. Jour. & Reviews: 82
  • Publ. in Conf. Proceedings: 27
  • Invited Talks: 12
  • Conf. Presentations: 92

 

Contact

Androula Nassiopoulou