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Number of persons working in the Nanoelectronics field:
The group of Nanoelectronics and the group of Semiconductor Components together consist of approximately 30 scientists
and 5 support staff.
Main Research activities in Nanoelectronics
- Silicon process integration
- DC and RF electrical characterization
- Cryostatic characterization
- Device modeling and simulation
- DC I-V and C-V characterization
- Infrared light emission
- Plasma process modeling
- Physical and chemical sensor
- Radiation imaging
Fabrication facilities: 1200 m2 clean room
The University of Twente opened its new Nanolab facility in November 2010, a 1200 m2 clean room for Nanotechnology experimentation with world class equipment.
- DC and RF probe stations up to 300-mm
- Thermochucks ranging -60 °C to 300 °C
- Cryostatic measurements, optical/electrical
- HRSEM, Dualbeam FIB, HRTEM
- XRD, XPS, nanoprober, AFM
- In situ spectroscopy in CVD/ALD
The groups participate in the MESA+ Institute for Nanotechnology, in particular in its Strategic Research Orientation (SRO) on Nanoelectronics.
In this SRO, a cooperation is organized with six research groups at the UT from the departments of Electrical Engineering, Applied Physics and Chemical Technology.
The groups further cooperate intensively with the University of Tokyo, the Nikhef Institute in Amsterdam, the University of Udine and NXP Semiconductors.
Organisation of Conferences and Summer Schools
Members of these research groups co-organized ESREF in 2008 and IEEE-ICMTS in 2011.
They are TPC members in IEDM, IRPS, ESSDERC, ICMTS and several other international conferences.
The groups publish about 20 journal papers and 30 conference papers per year.