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University of Twente (Netherlands)

The University of Twente is where talent can best realize its full potential. Students and staff are the key. Together, 3,300 scientists and professionals carry out ground-breaking research, bring about socially relevant innovation, and provide inspiring teaching for more than 9,000 students. To us, entrepreneurship comes as second nature. The campus is home to around 100 businesses, including student-run businesses. The University of Twente has also generated more than 700 successful spin-off companies. The university's business park, Kennispark Twente, encourages and assists entrepreneurs to start new companies. But there's so much more than that happening on our wonderful, green campus. Our sports and cultural facilities are unique and we host events such as the world's largest student think tank, Create Tomorrow. Another legend of the Twente campus is the Netherlands' largest student sports event, the Batavieren Race. The campus is a hive of activity - a truly inspirational place to be! - University of Twente, the entrepreneurial university.



Number of persons working in the Nanoelectronics field:

The group of Nanoelectronics and the group of Semiconductor Components together consist of approximately 30 scientists

and 5 support staff.


Main Research activities in Nanoelectronics

  • Silicon process integration
  • DC and RF electrical characterization
  • Cryostatic characterization
  • Device modeling and simulation
  • DC I-V and C-V characterization
  • Infrared light emission
  • Plasma process modeling
  • Physical and chemical sensor
  • Radiation imaging

Research facilities

Fabrication facilities: 1200 m2 clean room

The University of Twente opened its new Nanolab facility in November 2010, a 1200 m2 clean room for Nanotechnology experimentation with world class equipment.


Characterization platform

  • DC and RF probe stations up to 300-mm
  • Thermochucks ranging -60 °C to 300 °C
  • Cryostatic measurements, optical/electrical
  • HRSEM, Dualbeam FIB, HRTEM
  • XRD, XPS, nanoprober, AFM
  • In situ spectroscopy in CVD/ALD




The groups participate in the MESA+ Institute for Nanotechnology, in particular in its Strategic Research Orientation (SRO) on Nanoelectronics.

In this SRO, a cooperation is organized with six research groups at the UT from the departments of Electrical Engineering, Applied Physics and Chemical Technology.

The groups further cooperate intensively with the University of Tokyo, the Nikhef Institute in Amsterdam, the University of Udine and NXP Semiconductors.

Organisation of  Conferences and Summer Schools

Members of these research groups co-organized ESREF in 2008 and IEEE-ICMTS in 2011.

They are TPC members in IEDM, IRPS, ESSDERC, ICMTS and several other international conferences.



The groups publish about 20 journal papers and 30 conference papers per year.


Jurriaan Schmitz