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RWTH (Germany)


RWTH Aachen University is a well established research University located in Nordrhein-Westfalen, with over 44.500 students. The chair for Micro- and Nanoelectronics is part of the Faculty of Electrical Engineering and Information Technology. The chair closely cooperates with the Advanced Microelectronic Center Aachen, a research institute associated with RWTH Aachen University and run by non-profit organization AMO GmbH.  


Chair for Micro- and Nanoelectronics at RWTH Aachen University


Number of persons working in the Nanoelectronics field:

The total number of researchers working in the field of nanoelectronics at both institutions is 40.


Main Research activities in Nanoelectronics

RWTH Aachen University has appointed Prof. Lemme in February 2017 to carry out research on novel materials and devices as well as their integration into the silicon technology platform. In particular, research activities include graphene and 2D-material-based field effect transistors, hot electron transistors, optoelectronics, including photodetectors and modulators, 2D-based nano-electro-mechanical systems (NEMS) and printable electronics. These research directions can be described as n+4 technology node candidates. Hence, the objectives of RWTH Aachen University, and in particular the research group headed by Prof. Lemme, match ideally the objectives of the SINANO Institute.

Research facilities

Processing facilities:

Prof. Lemme is the Director of AMO, and the chair for Micro- and Nanoelectronics has full access to AMO’s 400m2 clean room.

The AMO infrastructure is set up for silicon technology and the co-integration with new materials.


Characterization platform




Project:                                  NanoGraM (Graphene membrane-based Nanoelectromechanical Systems)

Role / Budget / Years:            Partner / 2 M€ / 05/2015-04/2018

Project partners:                    Univ. Siegen, Infineon, Witec, Graphenea, Simune

Funding agency:                    M-ERANET, BMBF

Project:                                  GRADE (Graphene-based Devices and Circuits for RF Applications)

Role / Budget / Years:            Coordinator / 5.15 M€ / 10/2012-03/2016


Project:                                  InteGraDe (Integrating Graphene Devices), ERC Starting Grant

Role / Budget / Years:            Coordinator / 1.5M€ / 09/2012-09/2017

Project partners:                     Univ. Siegen

Funding agency:                    European Research Council (ERC)


Conference Organization

Technical Program Committee member of: ESSDERC, DRC, ULIS, IEDM (2008-2009; 2014-2015), Organizer of ULIS 2009, IEEE SNW



  1. S. Wagner, T. Dieing, A. Centeno, A. Zurutuza, A.D. Smith, M. Östling, S. Kataria, M.C. Lemme”, Non-invasive scanning raman spectroscopy and tomography for graphene membrane characterization”, Nano Letters, 2017.
  2. A.D. Smith, K. Elgammal, F. Niklaus, A. Delin, S. Vaziri, A.C. Fischer, F. Forsberg, M. Råsander, L. Bergqvist, S. Schröder, M. Östling, M.C. Lemme, “Resistive graphene humidity sensors with rapid and direct electrical readout“, Nanoscale, 7:19099-19109 (2015).
  3. A.D. Smith, F. Niklaus, A. Paussa, S. Vaziri, A.C. Fischer, M. Sterner, F. Forsberg, A. Delin, D. Esseni, P. Palestri, M. Östling, M.C. Lemme, “Electromechanical piezoresistive sensing in suspended graphene membranes”, Nano Letters, 13(7):3237- 3242 (2013).
  4. S. Vaziri, G. Lupina, C. Henkel, A.D. Smith, M. Östling, J. Dabrowski, G. Lippert, W. Mehr, M.C. Lemme, “A graphene-based hot electron transistor“, Nano Letters, 13(4):1435-1439 (2013).
  5. M.C. Lemme, F.H.L. Koppens, A.L. Falk, M.S. Rudner, H. Park, L.S. Levitov, C.M. Marcus, “Gate-Activated photoresponse in a graphene p-n junction”, Nano Letters, 11: 4134–4137 (2011).
  6. M.C. Lemme, T.J. Echtermeyer, M. Baus, H. Kurz, “A graphene field effect device”, IEEE Electron Device Letters, 28(4):282-284 (2007).


Max Lemme