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Teknologian Tutkimuskeskus VTT( Finland)


 2 Departments:  

1 Sensors and wireless systems         

2 Microsystems and nanoelectronics                                            


Main Research activities in Nanoelectronics

1 We develop new sensors, components and measurement devices using electronics, microelectromechanics, quantum mechanics and radio-, millimetre- and submillimetre wave technologies. Our world-class expertise in sensor physics and electronics allows us to design novel sensors optimised in terms of sensitivity, signal-to-noise ratio, selectivity, stability, and cost. Research topics include: RFID and its sensor applications, printed sensors and memories, electrical sintering of metallic nanoparticles, terahertz and millimetre-wave imaging technologies and spectroscopy, coherent quantum systems, molecular sensors and their integrated readout circuits, RF MEMS technology in adaptive antennas and RF modules, the front end of 60 GHz radio, CMOS technology for millimetre waves, automotive radar technologies and their new applications. We develop antennas for many applications

2 Silicon devices and microelectromechanical systems (MEMS) are fabricated in a productive pilot line. Devices are packaged at the wafer level or chip scale into functional microsystems. Multi-disciplinary smart system integration based on ceramic or polymer System-in-Package is also offered. The devices and systems we can fabricate include a wide selection of sensors, actuators, RF, fluidic, and photonic microsystems. The applications include environmental sensing, electronic timing, X-ray detection, telecommunication, and biomonitoring. Various nanoelectronics technologies are effectively used to nurture classical microsystems. Atomic layer deposition, nanoimprinting, and electron beam technologies are used to produce modern nanostructured materials for practical nanosystems. The increasing need for embedded sensing, monitoring and control requires new structural integration technologies for functionalities in both low-cost and harsh environment applications.                          

Research facilities

Processing Platform

2 VTT has two major cleanroom facilities for fabricating nanoelectronic devices and Microsystems,

at Micronova in Espoo and Micromodule Centre in Oulu. The former is an extensive wafer fab where

silicon and glass wafers are processed into devices; the latter concentrates on system integration.




Characterization and Modeling platform

1 We have modern simulation software (HFSS, IE3D, Aplac, Ansys), design tools (Mentor, Cadence, PADS),

and laboratory apparatus, e.g. network and spectrum analysers, etc. The frequency range extends up 110

GHz. In VTT and TKK’s joint laboratory, MilliLab, we can measure NF of amplifiers up to 220 GHz

, and characterize (DC and S- parameters) on wafer up to 220 GHz. For antennas we have apparatus

and anechoic chambers in frequency range of 100 MHz – 200 GHz.







Markku Abërg