Chair for Micro – and Nanoelectronics at RWTH Aachen University

Contact persons:

Max Lemme

RWTH Aachen

Templergraben 55
52062 Aachen

Germany

Equipment / Facilities

Processing platform

  • Dielectric deposition: LPCVD, ALD (Si3N4, SiO2, Al2O3)
  • Thin film deposition: E-Beam evaporation, Sputtering (Al, Ti, TiN, W, Ni, Cr, Co, HfO2)
  • 2D material deposition: CVD (graphene), ALD, PECVD
  • Pattern transfer: ICP/RIE (anisotropic profiles, smooth surfaces, F and Cl based etch chemistry)
  • Lithography: E-Beam lithography, Optical lithography (6” Mask Aligner, 6” I-line stepper), Interference lithography, Nanoimprint lithography
  • Wet chemistry
  • Critical point drying
  • Wafer dicing

Modelling platform

  • Lumerical FDTD (Photonics, Sensors)
  • Ansys Electronics HFSS (Photonics)
  • Phoenix OptoDesigner (Photonics)

Characterization platform

  • Automated SEM
  • Raman spectroscopy (532 nm, 637nm, 785 nm laser): Photo luminescence, photo current mapping, in-situ pressure/humidity
  • Electrical characterization: temperature range (20 K -600 K), DC, RF (up to 110 GHz)
  • Optical characterization: Light sources with 850 nm, 1310 nm, 1550 nm, tunable sources, electro optic, temperature rang (20 K – 600 K)
  • Spectroscopic ellipsometry
  • Atomic force microscope
  •  Optical microscope
Expertise

Beyond CMOS

  • 2D materials based devices and characterization

More Moore / Logic devices & circuits

  • Transistors
  • Inverters
  • ring oscillators
  • high k-dielectrics

More Moore / Memories

  • Non-volatile memory devices

More than Moore / Sensors

  • Photodetectors
  • pressure sensors
  • humidity sensors
  • strain sensors

More than Moore / Energy Harvesting

More than Moore / RF devices & circuits

  • RF Transistors
  • RF diodes
  • Characterization up to 11GHz

More than Moore / Photonics devices

  • Silicon and silicon nitride photonics
  • 2D photodetectors
  • multispectral photodetectors
  • high speed photodetection

More than Moore / Power devices

Flexible electronics / Organic devices

Flexible electronics / Others

  • Flexible electronics with 2D materials

Smart systems

Systems design

Research interests

Beyond CMOS

  • Graphene
  • transistion metal dichalcogenides
  • dielectric deposition on 2D materials
  • flexible electronics

More Moore / Logic devices & circuits

  • electrical contacts to 2D materials
  • 2D material based hot electron transistors
  • flexible devices

More Moore / Memories

  • Graphene non-volatile memory device

More than Moore / Sensors

  • 2D material based: MEMS/NEMS (strain sensors, pressure sensors)
  • 2D material photodiodes
  • 2D material spectral Photodetectors
  • flexible sensors

More than Moore / Energy Harvesting

More than Moore / RF devices & circuits

  • Graphene and 2D RF transistors and circuits

More than Moore / Photonics devices

  • PICs
  • IR detectors
  • Graphene photodetectors
  • 2D material-based photodetectors

More than Moore / Power devices

Flexible electronics / Organic devices

Flexible electronics / Others

  • Hall sensors
  • Photodetectors
  • Integrated circuits

Smart systems

  • Flexible integrated systems with 2D materials

Systems design