Research Center Juelich

Contact persons:

Qing-Tai Zhao, Siegfried Mantl


FZJ: Research Center Juelich

Forschungszentrum Jülich GmbH
52425 Jülich
Germany

Equipment / Facilities

Processing platform

  •  Micro/nanoelectronics clean room facility for CMOS/MEMS, III-V.
  • CMOS processing down to 10nm (EBL)
  • ALD/AVD for 300mm wafer (Al2O3, HfO2 based  dielectric/ferroelectric, TiN, TaN)
  • CVD for 200mm wafer (Si-Ge-Sn)
  • Ion implantation: 0.2keV-250keV (up to 300mm wafer)
  • RTP (up to 300mm wafer)
  • Sputtering
  • ….

Modelling platform

Characterization platform

Material characterization:
RBS/channeling, SIMS, XPS, XRD, high resolution TEM, AFM, APT,  …
Device characterization:
I-V, C-V,P-V, cryo-measurements, Hall setup (till to 15K), pulse measurements

Expertise

Beyond CMOS

  • Steep slope devices
  • nanowire devices
  • Junctionless MOSFETs
  • SiGeSn materials and devices

More Moore / Logic devices & circuits

More Moore / Memories

More than Moore / Sensors

  • Bio-chemical sensors

More than Moore / Energy Harvesting

More than Moore / RF devices & circuits

More than Moore / Photonics devices

  • GeSn photonics

More than Moore / Power devices

Flexible electronics / Organic devices

Flexible electronics / Others

Smart systems

Systems design

Research interests

Beyond CMOS

  • Tunnel FETs, negative capacitance FETs
  • Schottky source/drain MOSFETs, Schottky barrier tunning with impurity segregation and tunneling oxide
  • GAA Nanowire junctionless MOSFETs
  • High mobility devices with Ge and (Si)GeSn

More Moore / Logic devices & circuits

More Moore / Memories

More than Moore / Sensors

  • Sensors with nanowire devices

More than Moore / Energy Harvesting

More than Moore / RF devices & circuits

More than Moore / Photonics devices

  • (Si)GeSn growth and characterization
  • Group IV photonics and lasing

More than Moore / Power devices

Flexible electronics / Organic devices

Flexible electronics / Others

Smart systems

Systems design