National Center for Scientific Research Demokritos

Contact persons:

Androula Nassiopoulou

NCSR Demokritos

Patr. Gregoriou E & 27 Neapoleos Str,

15341 Agia Paraskevi,

GREECE – (Map)

Equipment / Facilities

Processing platform

–       The Nanotechnology and Microsystems Laboratory (N&M lab) of NCSRD/INN includes a full Si processing laboratory in a clean room area (500m2, ISO 6 and ISO 5 clean areas), equipped with chemical and thermal processes, optical and e-beam lithography tools, reactive ion etcher, high density plasma etcher, ion implanter, LPCVD system for polycrystalline Si and Si oxides/nitrides and inspection equipment, The 100keV modern electron beam lithography (EBL) tool is capable of sub-10nm patterning on up to 150mm wafer-size. Satellite laboratories in grey-area (cleanroom environment ISO 8) include a high plasma density lab for deep etching, micromachining and packaging laboratories, sensor fabrication labs and electrochemistry lab, chemistry laboratory for resist development and organic material synthesis for organic electronics and OLEDS.

–      Molecular beam epitaxy with in-situ surface analysis techniques  (XPS/ARPES)

For more information please see: http://imel.demokritos.gr/infra_access.shtml

Modelling platform

–     ANSYS software including HFSS (High Frequency Electromagnetic Field Simulation)

–     In-house developed software for simulating resist surface and sidewall roughness

Characterization platform

The characterization labs include:

–          Analytical surface characterization tools and accessories XPS/ARPES)

–          Electron microscopy lab with state-of-the art a) transmission electron microscopes (HRTEM), equipped with analytical techniques (EELS EDX), b) FESEMs, c) STM/AFM

–          Electrical characterization equipment (probe stations (room, low and high temperatures), HP equipment for I-V, C-V, Keithleys) etc. Charactrerization includes both materials and devices

–          Sensor characterization and testing equipment

–          Optical laboratory (photoluminescence, solar cell characterization, photonic material characterization)

 

For more information please see: http://imel.demokritos.gr/infra_access.shtml

Expertise

Beyond CMOS

More Moore / Logic devices & circuits

  • Nanowire MOSFETS

More Moore / Memories

  • Si nanocrystal memories, Phase-change memories

More than Moore / Sensors

  • Thermal sensors (gas and liquid flow, chemical, acceleration and  pressure sensing), Microfluidics, Capacitive pressure sensors, bio-sensors,
  • RF-based sensors

More than Moore / Energy Harvesting

  • Piezo-resistive devices, electromagnetic energy harvesting

More than Moore / RF devices & circuits

  • RF passive devices (co-planar waveguides, filters, antennas)
  • Local low-loss RF substrate for the on-chip integration of devices

More than Moore / Photonics devices

  • Solar cells, Theoretical modeling of waves in the micro- and nano-scale

More than Moore / Power devices

  • RF passives for power devices

Flexible electronics / Organic devices

  • Organic light emitting diodes, organic photovoltaics

Flexible electronics / Others

Smart systems

  • Mass flow meter (applications in automotive and respiration control), bioanalytical microsystems

Systems design

Research interests

Beyond CMOS

More Moore / Logic devices & circuits

  • Thin dielectrics, MIS capacitors, MIM capacitors, Nanowires, 2D materials, Si nanowire MOSFETS

More Moore / Memories

  • Nanocrystal memories, Phase-change memories

More than Moore / Sensors

  • Si nanowires by metal-assisted chemical etching, Si nanowires by e-beam lithography and etching, porous Si, porous anodic alumina, barrier type alumina, pore filling, materials by electrochemistry, ZnO nanowires, carbon nanofilms, thermoelectric materials and devices

More than Moore / Energy Harvesting

  • Si nanowires, ZnO nanowires, Si membranes, porous Si (material fabrication, properties and applications), Micromachining, Thermoelectrics

More than Moore / RF devices & circuits

  • Local low-loss substrate technology for the on-chip integration of RF and mm-wave passive devices, including high performance on-chip antenna

More than Moore / Photonics devices

  • Low-cost Si solar cells, organic solar cells, OLEDS

More than Moore / Power devices

  • On-chip RF passive devices

Flexible electronics / Organic devices

  • Materials development, novel devices

Flexible electronics / Others

Smart systems

  • Applications in automotive, Health Care, Environment

Systems design