National Center for Scientific Research Demokritos

Contact persons:

Panagiotis Dimitrakis

NCSR Demokritos

Patr. Gregoriou E & 27 Neapoleos Str,

15341 Agia Paraskevi,

GREECE – (Map)

Equipment / Facilities

Processing platform

–       The Nanotechnology and Microsystems Laboratory (N&M lab) of NCSRD/INN includes a full Si processing laboratory in a clean room area (500m2, ISO 6 and ISO 5 clean areas), equipped with chemical and thermal processes, optical and e-beam lithography tools, reactive ion etcher, high density plasma etcher, ion implanter, LPCVD system for polycrystalline Si and Si oxides/nitrides and inspection equipment, The 100keV modern electron beam lithography (EBL) tool is capable of sub-10nm patterning on up to 150mm wafer-size. Satellite laboratories in grey-area (cleanroom environment ISO 8) include a high plasma density lab for deep etching, micromachining and packaging laboratories, sensor fabrication labs and electrochemistry lab, chemistry laboratory for resist development and organic material synthesis for organic electronics and OLEDS.

–      Molecular beam epitaxy with in-situ surface analysis techniques  (XPS/ARPES)

For more information please see: http://imel.demokritos.gr/infra_access.shtml

Modelling platform

–     ANSYS software including HFSS (High Frequency Electromagnetic Field Simulation)

–     In-house developed software for simulating resist surface and sidewall roughness

Characterization platform

The characterization labs include:

–          Analytical surface characterization tools and accessories XPS/ARPES)

–          Electron microscopy lab with state-of-the art a) transmission electron microscopes (HRTEM), equipped with analytical techniques (EELS EDX), b) FESEMs, c) STM/AFM

–          Electrical characterization equipment (probe stations (room, low and high temperatures), HP equipment for I-V, C-V, Keithleys) etc. Charactrerization includes both materials and devices

–          Sensor characterization and testing equipment

–          Optical laboratory (photoluminescence, solar cell characterization, photonic material characterization)

 

For more information please see: http://imel.demokritos.gr/infra_access.shtml

Expertise
Main Expertises
Beyond CMOS Neuromorphic Computing x
Phonon engineering x
Small slope switches-NW/TFET/NEMS x
Alternative materials-2D layers x
Novel devices for ultra-low power x
1D x
Quantum Technologies & Very low temperature electronics x
More Moore Logic Nanodevices& circuits
  • Nanowire MOSFETS
Memories
  • Si nanocrystal memories, Phase-change memories
Very low power devices x
High temperature electronics x
More than Moore micro-nano-bio Sensors & Systems
  • Thermal sensors (gas and liquid flow, chemical, acceleration and  pressure sensing), Microfluidics, Capacitive pressure sensors, bio-sensors,
  • RF-based sensors
Energy Harvesting
  • Piezo-resistive devices, electromagnetic energy harvesting
RF devices & circuits
  • RF passive devices (co-planar waveguides, filters, antennas)
  • Local low-loss RF substrate for the on-chip integration of devices
Photonics devices
  • Solar cells, Theoretical modeling of waves in the micro- and nano-scale
Power devices
  • RF passives for power devices
Flexible electronics
  • Organic light emitting diodes, organic photovoltaics
Smart systems& Systems design Smart systems
  • Mass flow meter (applications in automotive and respiration control), bioanalytical microsystems
Systems design x
Research interests
Research Interests
Beyond CMOS Neuromorphic Computing x
Phonon engineering x
Small slope switches-NW/TFET/NEMS x
Alternative materials-2D layers x
Novel devices for ultra-low power x
1D x
Quantum Technologies & Very low temperature electronics x
More Moore Logic Nanodevices& circuits
  • Thin dielectrics, MIS capacitors, MIM capacitors, Nanowires, 2D materials, Si nanowire MOSFETS
Memories
  • Nanocrystal memories, Phase-change memories
Very low power devices x
High temperature electronics x
More than Moore micro-nano-bio Sensors & Systems
  • Si nanowires by metal-assisted chemical etching, Si nanowires by e-beam lithography and etching, porous Si, porous anodic alumina, barrier type alumina, pore filling, materials by electrochemistry, ZnO nanowires, carbon nanofilms, thermoelectric materials and devices
Energy Harvesting
  • Si nanowires, ZnO nanowires, Si membranes, porous Si (material fabrication, properties and applications), Micromachining, Thermoelectrics
RF devices & circuits
  • Local low-loss substrate technology for the on-chip integration of RF and mm-wave passive devices, including high performance on-chip antenna
Photonics devices
  • Low-cost Si solar cells, organic solar cells, OLEDS
Power devices
  • On-chip RF passive devices
Flexible electronics
  • Materials development, novel devices
Smart systems& Systems design Smart systems
  • Applications in automotive, Health Care, Environment
Systems design x