University of Twente

Contact persons:

Jurriaan Schmitz

University of Twente
Drienerlolaan 5
7522 NB Enschede

Netherlands

Equipment / Facilities

Processing platform

The University of Twente has a Nanolab facility  comprising a 1200 m2 clean room for Nanotechnology experimentation with world class equipment.

Available equipment :

  • Many tools including deposition tools (ALD, CVD and PLD), e-beam lithography, nanoimprint, implanter, sputter tools
  • Many physical characterization tools including HRSEM, Dualbeam FIB, TEM, XRD, XPS, nanoprober, AFM, In situ spectroscopy in CVD/ALD

We are fully equipped for:

  • Silicon process integration
  • MEMS, microfluidics, silicon photonics
  • Nanotechnology

Modelling platform

Silvaco, Synopsys, COMSOL

Characterization platform

  • Wafer level DC and RF (up to ~100 GHz) electrical characterization
  • Visible and infrared light emission characterization
  • Chip level cryostatic characterization
Expertise

Beyond CMOS

  • New devices (fabrication, processing):
    • Ferroelectric devices
    • Electromechanical incl. piezoelectric devices
  • ·Single-electron devices, quantum dots
  • New materials, e.g. 2D materials, ferroelectric materials, Gallium-Nitride
  • Characterization and device physics of new devices, materials

More Moore / Logic devices & circuits

  • Ultra-low power device concepts, e.g. FD-SOI, UTB, FinFETs
  • Device and system reliability
  • Device physics, characterization, modeling, TCAD

More Moore / Memories

More than Moore / Sensors

  • Radiation, flow, acceleration, isfet

More than Moore / Energy Harvesting

  • Thin film solar cells on chip

More than Moore / RF devices & circuits

  • RF characterization (up to ~100GHz)
  • Device physics, modeling, TCAD

More than Moore / Photonics devices

  • Silicon photonics (fabrication, device physics, characterization)

More than Moore / Power devices

  • VDMOS, LDMOS, Trench MOS, AlGaN/GaN-HEMTs
  • Device physics, characterization, modelling and TCAD

Flexible electronics / Organic devices

  • P3HT OFETs & VOFETs (fabrication)
  • Device physics, characterization, Modelling, and TCAD

Flexible electronics / Others

Smart systems

Systems design

Research interests

Beyond CMOS

  • New devices (fabrication, processing)
  • New materials
  • Characterization and device physics of new devices, materials

More Moore / Logic devices & circuits

  • Ultra-low power device concepts
  • Device and system reliability
  • Device physics, characterization, modeling, TCAD

More Moore / Memories

More than Moore / Sensors

  • Radiation, flow, acceleration, isfet

More than Moore / Energy Harvesting

  • Thin film solar cells on chip

More than Moore / RF devices & circuits

  • RF characterization
  • Device physics, TCAD

More than Moore / Photonics devices

  • Silicon photonics

More than Moore / Power devices

  • VDMOS, LDMOS, Trench MOS, III-N-HEMTs
  • Device physics, characterization, modelling and TCAD

Flexible electronics / Organic devices

  • P3HT OFETs & VOFETs (fabrication)
  • Device physics, characterization, Modelling, and TCAD

Flexible electronics / Others

Smart systems

Systems design