University of Twente

Contact persons:

Jurriaan Schmitz

University of Twente
Drienerlolaan 5
7522 NB Enschede

Netherlands

Equipment / Facilities

Processing platform

The University of Twente has a Nanolab facility  comprising a 1200 m2 clean room for Nanotechnology experimentation with world class equipment.

Available equipment :

  • Many tools including deposition tools (ALD, CVD and PLD), e-beam lithography, nanoimprint, implanter, sputter tools
  • Many physical characterization tools including HRSEM, Dualbeam FIB, TEM, XRD, XPS, nanoprober, AFM, In situ spectroscopy in CVD/ALD

We are fully equipped for:

  • Silicon process integration
  • MEMS, microfluidics, silicon photonics
  • Nanotechnology

Modelling platform

Silvaco, Synopsys, COMSOL

Characterization platform

  • Wafer level DC and RF (up to ~100 GHz) electrical characterization
  • Visible and infrared light emission characterization
  • Chip level cryostatic characterization
Expertise
Main Expertises
Beyond CMOS Neuromorphic Computing
  • Device architectures
  • Device fabrication,
  • Network architectures,
  • AI
Phonon engineering x
Small slope switches-NW/TFET/NEMS
  • Ferroelectrics-based devices;
  • Piezoelectric-based devices;
  • Device architecture
  • Device fabrication
  • Device modeling
Alternative materials-2D layers
  • Atomic layer deposition of ultra-thin films (insulators, semiconductors, conductors)
Novel devices for ultra-low power
  • Ferroelectrics-based devices;
  • Piezoelectric-based devices;
  • Device architecture
  • Device fabrication
  • Device modeling
1D x
Quantum Technologies & Very low temperature electronics
  • Single-atom transistors (fabrication and cryogenic testing)
More Moore Logic Nanodevices& circuits
  • C-V and I-V characterization;
  • Interface state measurement, reliability
Memories x
Very low power devices x
High temperature electronics x
More than Moore micro-nano-bio Sensors & Systems
  • Lab-on-chip,
  • Organ-on-chip: system architecture, prototyping, applications
Energy Harvesting
  • • PV on chip
RF devices & circuits
  • RF MEMS device design, fabrication and characterization
Photonics devices
  • Photodiodes, SI light emitters, Si optocouplers
Power devices
  • Si, GaN device architecture and characterization
Flexible electronics
  • P3HT OFETs & VOFETs (fabrication)
  • Device physics, characterization, Modelling, and TCAD
Smart systems& Systems design Smart systems x
Systems design x
Research interests
Research interests
Beyond CMOS Neuromorphic Computing
  • Device architectures
  • Device fabrication,
  • Network architectures,
  • AI
Phonon engineering x
Small slope switches-NW/TFET/NEMS
  • Ferroelectrics-based devices;
  • Piezoelectric-based devices;
  • Device architecture
  • Device fabrication
  • Device modeling
Alternative materials-2D layers
  • Atomic layer deposition of ultra-thin films (insulators, semiconductors, conductors)
Novel devices for ultra-low power
  • Ferroelectrics-based devices;
  • Piezoelectric-based devices;
  • Device architecture
  • Device fabrication
  • Device modeling
1D x
Quantum Technologies & Very low temperature electronics
  • Single-atom transistors (fabrication and cryogenic testing
More Moore Logic Nanodevices& circuits
  • C-V and I-V characterization;
  • Interface state measurement, reliability
Memories x
Very low power devices x
High temperature electronics x
More than Moore micro-nano-bio Sensors & Systems
  • Lab-on-chip,
  • Organ-on-chip: system architecture, prototyping, applications
Energy Harvesting
  • PV on chip
RF devices & circuits
  • RF MEMS device design, fabrication and characterization
Photonics devices
  • Photodiodes, SI light emitters, Si optocouplers
Power devices
  • Si, GaN device architecture and characterization
Flexible electronics x
Smart systems& Systems design Smart systems x
Systems design x